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The Science and engineering of microelectronics fabrication

Campbell, Stephen A.

The Science and engineering of microelectronics fabrication Stephen A. Campbell. - New York Oxford University Press 2008 - xiv, 603 p.: ill.; 23 cm. - (The Oxford series in electrical and computer engineering). .

ISBN: 9780195681444

Subjects--Topical Terms:
Semi Conducter - Design and Construction.

Dewey Class. No.: 621.38152 / C16S

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