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MEMS a practical guide to design, analysis and applications

MEMS a practical guide to design, analysis and applications edited by Jan G. Korvink and Oliver Paul. - Heidelberg Springer 2006 - xxv, 965p.: ill.; 23cm.

ISBN: 3540211179

Subjects--Topical Terms:
Microelectromechanical Systems.

Dewey Class. No.: 621 / M53M

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