Microelectronics role of VLSI in MEMS  proceedings of the workshop, New Delhi, December 4 

 - [s.l.]  [s.n.]  [n.d.] 
 - v, 119p.: ill.; 22cm. 
<br/><br/><label>ISBN: </label>6167490063 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic Engineering. Council of Scientific and Industrial Research (Csir), New Delhi  Central Electronic Engineering Research Institute (Ceeri), Pilani 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P88M