TY  - BOOK
ED  - Proceedings of the workshop (2002: New Delhi)
TI  - Microelectronics role of VLSI in MEMS: proceedings of the workshop, New Delhi, December 4
SN  - 6167490063
U1  - 621.381 
PY  - 0000///[n.d.]
CY  - [s.l.]
PB  - [s.n.]
KW  - Electronic Engineering
KW  - Council of Scientific and Industrial Research (Csir), New Delhi
KW  - Central Electronic Engineering Research Institute (Ceeri), Pilani
ER  -