MEMS  a practical guide to design, analysis and applications 
edited by Jan G. Korvink and Oliver Paul. 
 - Heidelberg  Springer  2006 
 - xxv, 965p.: ill.; 23cm. 
<br/><br/><label>ISBN: </label>3540211179 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical Systems.
<br/><br/><label>Dewey Class. No.: </label>621  / M53M