TY  - BOOK
AU  - Korvink, Jan G.
AU  - Paul, Oliver
TI  - MEMS: a practical guide to design, analysis and applications
SN  - 3540211179
U1  - 621 
PY  - 2006///
CY  - Heidelberg
PB  - Springer
KW  - Microelectromechanical Systems
ER  -