000 00655nam a2200169Ia 4500
008 241209s9999 xx 000 0 und d
020 _a6167490063
040 _aJamia Hamdard
041 _aEnglish
082 _a621.381
_bP88M
111 _aProceedings of the workshop (2002: New Delhi)
245 0 _aMicroelectronics role of VLSI in MEMS
_bproceedings of the workshop, New Delhi, December 4
260 _a[s.l.]
_b[s.n.]
_c[n.d.]
300 _av, 119p.: ill.; 22cm.
650 _aElectronic Engineering.
_cCouncil of Scientific and Industrial Research (Csir), New Delhi
_dCentral Electronic Engineering Research Institute (Ceeri), Pilani
942 _cBK
999 _c34646
_d34646