000 00546nam a2200181Ia 4500
008 241213s9999 xx 000 0 und d
020 _a3540211179
040 _aJamia Hamdard
041 _aEnglish
082 _a621
_bM53M
245 0 _aMEMS
_ba practical guide to design, analysis and applications
_cedited by Jan G. Korvink and Oliver Paul.
260 _aHeidelberg
_bSpringer
_c2006
300 _axxv, 965p.: ill.; 23cm.
650 _aMicroelectromechanical Systems.
700 _aKorvink, Jan G.
700 _aPaul, Oliver
942 _cBK
999 _c50036
_d50036