000 | 00546nam a2200181Ia 4500 | ||
---|---|---|---|
008 | 241213s9999 xx 000 0 und d | ||
020 | _a3540211179 | ||
040 | _aJamia Hamdard | ||
041 | _aEnglish | ||
082 |
_a621 _bM53M |
||
245 | 0 |
_aMEMS _ba practical guide to design, analysis and applications _cedited by Jan G. Korvink and Oliver Paul. |
|
260 |
_aHeidelberg _bSpringer _c2006 |
||
300 | _axxv, 965p.: ill.; 23cm. | ||
650 | _aMicroelectromechanical Systems. | ||
700 | _aKorvink, Jan G. | ||
700 | _aPaul, Oliver | ||
942 | _cBK | ||
999 |
_c50036 _d50036 |